Product Details

Product Details
Product Details

MASS FLOW CONTROLLER/
MF5100B

◆Download Specs
Specification Sheet

THE MODEL MF5100B MASS FLOW CONTROLLER FEATURES EXTENDED CAPABILITY OF RANGES UP TO 400 SLM, HIGHER TERMPERATURE STABILITY AND MANY FUNCTIONS.
Features

■ MINIMUN RANGE OF 5 SCCM & UP TO 400 SLM
„„■COMPACT SIZE
„■„ STANDARD SOFT-START FUNCTION
„„■MINIMUM LEAKAGE OF 1.013 × 10-10Pa·m3/s (He)